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Publications in Scientific Journals:

N. Adamovic, I. Giouroudi, J. Matovic, Z. Djinovic, U. Schmid:
"Microactuators for Fluidic Applications: Principles, Devices and Systems";
Journal of Microelectronics and Electronic Packaging, 6 (2009), 4; 250 - 264.



English abstract:
Much effort in microfluidics reseal"Ch has been aimed
at designing microscale pumps, valves, switches, dispensers, mixers,
filters, separators, and so on, which have a major role in the development
of innovative systems like chemical process control,
bioanalytical devices, medical drug delivery systems, environmental
control, and others. Most of these microfluidic devices have one
thing in common: the need for precise manipulation and control of
small amounts of fluids.
MEMS/NEMS research is continuously opening up new knowledge
on modeling approaches, novel materials, and MEMSI
NEMS processing technologies that stimulate and accelerate the
development of new actuation principles and novel actuator configurations.
This review paper presents research work on different actuation
techniques that are used for the whole range of microfluidic
applications. It covers thermomechanical and electrochemical
actuation principles, as well as actuation induced with external
electric or magnetic fields. It presents a bdef explanation of the
operating principle of each type of actuator, actuator configuration,
its main characteristics, like power consumption, operational
voltage, frequency range, and working fluids, and a discussion of
comparisons among different actuation schemes.
This study compiles and provides some basic guidelines for
selection of the actuation schemes that are currently implemented
in microfluidic devices.

Keywords:
Bimaterial actuation, phase transformation actuation, piezoelectric actuation, electrostatic actuation, SMA actuation, EHD actuation, EAP actuation, ERF actuation, EWD actuation, magneto mechanical actuation, MHD actuation, ECM actuation

Created from the Publication Database of the Vienna University of Technology.