A. Deutschinger, U. Schmid, M. Schneider, W. Brenner, H. D. Wanzenböck, B. Volland, T. Ivanov, I. Rangelow:
"Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique";
Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 16 (2010), 11; S. 1901 - 1908.

Kurzfassung englisch:
A micromachined electro-thermal gripper, first
introduced by Ivanova et al. (Microelectron Eng 83:1393-
1395, 2006), represents a promising candidate for the
manipulation and handling of micro or even nano-scaled
objects. To further optimize the performance of the device, a
detailed electrical and mechanical characterization is needed.
Due to the so-called duo-action gripper approach (i.e., a
separate actuator for closing and opening action) these
investigations focused on the maximum (minimum) opening
width being 11.5 lm (3.3 lm), while in rest position a value
of 4 lm is feasible. The maximum, electrical input power is
limited to 80 mW/actuator element, resulting in a current
density of up to 1.27 MA cm-2 in the corresponding metal
layers. When applying, however, larger current densities the
probability of device failure increases substantially as in
combination with an enhanced temperature of about 200°C
electromigration effects occur in the metallization. Furthermore,
the cut-off frequency and parasitic effects during
actuation such as the z-deflection and the increase in length

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