[Zurück]

J. Hernando-Garcia, J.L. Sànchez-Rojas, U. Schmid, A. Ababneh, G. Marchand, H. Seidel:
"Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators";
Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 16 (2010), 5; S. 855 - 861.

Micro-cantilevers and micro-bridges actuated
by sputter-deposited aluminium nitride (AlN) thin films
were measured with a scanning laser Doppler vibrometer
up to 6 MHz, covering more than 10 resonance modes of
different nature. A finite element model (FEM) was used to
simulate the modal response of the micromachined structures.
The comparison between experiment and simulation,
regarding modal shapes and frequencies, resulted in an
excellent agreement. An interferometric microscope was
also used to study the static deflection of the structures.
These measurements revealed a very low surface stress for
the different micro-resonators. Finally, we point out how
the amplitude of a given resonant mode can be controlled
depending on the piezoelectric charge collected by the top
electrode layout.

http://dx.doi.org/10.1007/s00542-009-1015-y