[Zurück]

T. Manzaneque, J. Hernando-Garcia, L. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid, J.L. Sànchez-Rojas:
"Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid";
Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 16 (2010), 5; S. 837 - 845.

The quality factor (Q) of different modes of
self-actuated aluminium nitride beams operated in air and
liquid media is analyzed applying different techniques. In
air, both optical and electrical techniques are used. In the
case of the optical approach, characterization is done with a
laser Doppler vibrometer. The values for the Q factors are
deduced straight forward from both the frequency spectrum
and the transient response, while electrical impedance
measurements need a more careful evaluation with two
different fitting methods to obtain the Q factor of the
vibration modes. In water, only optical measurements,
more sensitive than the electrical measurements, could be
used to determine the Q factor of selected modes. In
addition, the results of finite element model analysis were
compared to the experimental data, showing an excellent
agreement regarding the modal shape and the resonance
frequency of the microresonators.

http://dx.doi.org/10.1007/s00542-009-1003-2