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C. Bolzmacher, K. Bauer, U. Schmid, M. Hafez, H. Seidel:
"Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materials";
Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 16 (2010), 5; S. 847 - 853.

In this work, amplification units made of robust
metallic nickel titanium (NiTi) and single crystal silicon
are compared and evaluated for the application in miniaturized
piezoelectric actuators for flow control purposes.
The amplification mechanism with a sliced membrane
structure is based on a mechanical lever in order to amplify
the low piezoelectrically induced deformation. Therefore,
an enhanced output stroke can be provided up to high
frequencies. The different membrane fabrication processes
using laser ablation for the NiTi alloy and deep reactive ion
etching for the silicon substrate, as well as the results of
finite element simulations and experimental measurements
are reported. An amplification factor of 9 has been
achieved for an optimized load transmission point position.
The dynamic response shows a quality factor of 25 and 494
at the first fundamental mode for NiTi and silicon membranes,
respectively. Compared to silicon, NiTi shows
enhanced properties against failure and facilitates the
integration process.

http://dx.doi.org/10.1007/s00542-009-1008-x