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T. Manzaneque, J. Hernando-Garcia, A. Ababneh, H. Seidel, Ü. Sökmen, E. Peiner, U. Schmid, J.L. Sànchez-Rojas:
"Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop";
Procedia Engineering, 5 (2010), 1494 - 1497.

This report details electronic feedback techniques which allow precise control of the quality factor Q of a two-port piezoelectric
micromechanical resonator device, independent of the ambient operating conditions. A circuit including a microbridge resonator
has been implemented to increase the quality factor of the device. Q amplification has been validated by both time domain and
frequency spectrum measurements. In addition to electrical measurements, a mechanical characterization of the resonator was
carried out by means of a laser vibrometer, which confirmed the increase in Q factor due to the electronic feedback.
Enhancement factors of almost two orders of magnitude were achieved, demonstrating an effective way to improve the
performance of piezoelectric MEMS by a suitable electronic design.

micromachined resonators; piezoelectric; aluminium nitride; Q factor; velocity feedback;

http://dx.doi.org/10.1016/j.proeng.2010.09.400