Publications in Scientific Journals:
S. Fricke, A. Friedberger, H. Seidel, U. Schmid:
"Micromachined Pressure Sensor Based on Sapphire for High Temperature Applications";
Procedia Engineering,
5
(2010),
1396
- 1400.
English abstract:
which is targeted for harsh environmental applications. High temperature levels, aggressive media and high pressure loads
typically occur in gas turbines, rocket engines or deep drilling systems. For pre-evaluation purposes, a reusable packing is used
enabling very effectively device characterization up to temperatures of 300°C and pressures of 100 bar. As expected, the output
signals of the Wheatstone bridge increase with higher pressures, but decrease with enhanced temperature levels. These curves
show a maximum, negative drift of about -30 ppm at full temperature and pressure load and the sensitivity is about
10 ~V/(V·bar).
Keywords:
sapphire; platinum; thin film metallization; pressure sensor; harsh environment; reusable packaging
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.proeng.2010.09.376
Created from the Publication Database of the Vienna University of Technology.