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A. Kenda, M. Kraft, A. Tortschanoff, C. Wagner, B. Lendl, A. Sandner, H. Schenk:
"Miniaturized MEMS-based spectrometric sensor for process control and analysis of carbonated beverages";
Proc. SPIE-The International Society for Optical Engineering, 7594 (2010).

With MEMS, it became possible to build pocket-sized spectrometers for various spectral ranges, including the near-IR or mid-IR. These systems are highly rugged and can measure spectral changes at ms time resolution or co-add several hundreds of scans to one spectrum achieving adequate signal-to-noise ratios. Two spectrometer systems a scanning grating based spectrometer and a FT-IR spectrometer both based on a micromechanical scanning mirror technology are presented. Furthermore, the focus of this work is on the development of an analyzer for dissolved CO2 showing the methodology and also first implementation steps towards a sensor solution. CO2(aq) calibration samples were prepared by different NaHCO3 concentrations in solution. Spectra and calibration data acquired with both MEMS based spectrometer prototypes are presented.

http://dx.doi.org/10.1117/12.841957