Publications in Scientific Journals:
K. Dobes, P. Naderer, N. Lachaud, C. Eisenmenger-Sittner, F. Aumayr:
"Sputtering of tungsten by N+ and N2+ ions: investigations of molecular effects";
Total sputtering yield of a polycrystalline tungsten surface during bombardment with both
atomic N+ and molecular N+2 ions is determined using a highly accurate quartz crystal
microbalance technique. The results thus obtained compare well with existing experimental
data. At ion energies below 1 keV, an unexpected pronounced molecular effect is found, i.e.
the sputtering yield per nitrogen atom for N+2 molecular ions is up to 25% higher than that of a
single N+ ion with the same velocity. A qualitative explanation for this enhancement based on
a simple energy transfer model is presented.
Created from the Publication Database of the Vienna University of Technology.