[Zurück]

K. Leitz, B. Redlingshöfer, Y. Reg, A. Otto et al.:
"Metal Ablation with Short and Ultrashort Laser Pulses";
Vortrag: 6th International WLT Conference on Lasers in Manufacturing, München (eingeladen); 23.05.2011 - 26.05.2011.

Abstract
In laser microstructuring there is a general conflict between precision and efficiency. Short pulsed micro- and nanosecond
systems generally allow high ablation rates. Yet, thermal damage of the workpiece cannot be avoided completely. Ultrafast pico-
and femtosecond systems allow a higher precision, yet at lower ablation efficiency. This on the one hand can be attributed to the
generally lower medium laser power of the ultrafast laser systems, on the other hand to the changed ablation mechanisms. In this
contribution a comparative study of the ablation of metal with micro-, nano-, pico- and femtosecond laser pulses shall be
presented.

Abstract
In laser microstructuring there is a general conflict between precision and efficiency. Short pulsed micro- and nanosecond
systems generally allow high ablation rates. Yet, thermal damage of the workpiece cannot be avoided completely. Ultrafast pico-
and femtosecond systems allow a higher precision, yet at lower ablation efficiency. This on the one hand can be attributed to the
generally lower medium laser power of the ultrafast laser systems, on the other hand to the changed ablation mechanisms. In this
contribution a comparative study of the ablation of metal with micro-, nano-, pico- and femtosecond laser pulses shall be
presented.

laser ablation of metals, short pulsed lasers, ultrafast lasers, beam-matter interaction

http://publik.tuwien.ac.at/files/PubDat_202692.pdf