[Zurück]

V. Ruiz, J. Hernando-Garcia, A. Ababneh, H. Seidel, U. Schmid, J. Gimzewski:
"Characterization of the first in-plane mode of AlN-actuated microcantilevers";
Proceedings of SPIE, 8066 (2011), S. 1 - 7.

The characterization of the first in-plane mode of AlN-actuated piezoelectric microcantilevers was done using different techniques. The top electrode of the cantilever was designed to allow for an efficient electrical actuation of these in-plane modes. The detection of the electrically induced in-plane movement was performed optically with the help of a stroboscopic microscope and electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the above techniques. Our results show quality factor values as high as 3000 for the first in-plane mode in air.

MEMS, resonators, in-plane motion, piezoelectric, AlN

http://dx.doi.org/10.1117/12.886981