Publications in Scientific Journals:
V. Ruiz, J. Hernando-Garcia, A. Ababneh, H. Seidel, U. Schmid, J. Gimzewski:
"Characterization of the first in-plane mode of AlN-actuated microcantilevers";
Proceedings of SPIE,
8066
(2011),
1
- 7.
English abstract:
The characterization of the first in-plane mode of AlN-actuated piezoelectric microcantilevers was done using different techniques. The top electrode of the cantilever was designed to allow for an efficient electrical actuation of these in-plane modes. The detection of the electrically induced in-plane movement was performed optically with the help of a stroboscopic microscope and electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the above techniques. Our results show quality factor values as high as 3000 for the first in-plane mode in air.
Keywords:
MEMS, resonators, in-plane motion, piezoelectric, AlN
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1117/12.886981
Created from the Publication Database of the Vienna University of Technology.