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S. Barth, R. Jimenez-Diaz, J. Sama, A. Romano-Rodriguez:
"CMOS-Compatible Localized Growth And Integration of Semiconducting Nanowires";
Poster: 4^th EuCheMS Chemistry Congress, Prague, Czech Republic; 2012-08-26 - 2012-08-30; in: "4^th EuCheMS Chemistry Congress - Final Program", (2012), P-701.

In recent years, one-dimensional semiconductor nanostructures with tunable morphologies, dimensions, crystallographic phases, and orientations have gained tremendous attention due to their vast number of applications, including electronics, sensing, energy harvesting, etc... Several techniques have been successfully employed for the growth of high quality semiconducting nanowires; however, most of the processes using metal supported methodologies require high temperatures of an entire substrate for an effective formation of single crystalline nanowires.
In this study, we used micromembranes and microhotplates for the localized growth of high quality semiconducting nanowires, including Ge, SnO₂ and In₂O₃, via LPCVD techniques employing molecular sources. The heated areas were the range of several hundreds of square microns allowing a site-specific formation of nanowires. Key features of such microsystems are extremely fast cooling and heating processes due to their low mass and low power consumption. The growing nanowire bundles bridge the gap between a set of interdigital electrodes located on top of the heated membranes und thus leading to in situ contact formation. This approach allows us to perform heating and measuring operations independently, which is mandatory for thermally supported devices such as metal oxide gas sensors.
To the best of our knowledge, this is the first report for the growth of these materials using such a technique. Additional advantages include the possibility to grow various types of nanowires on the same chip using multiple micromembranes or microhotplates and the in situ contact formation replacing cost and time consuming procedures. The presented data will demonstrate the enormous potential of this approach for the fabrication of novel nanostructure-based devices.

Chemical vapor deposition; Nanostructures; Nanotechnology; Sensors;