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J. Laimer, H. Störi, E. Ruppert, W. Gärtner:
"Characterization of a triode sputter source used for the deposition of inner narrow hollow cylinders";
Poster: 13th International Conference on Plasma Surface Engineering (PSE 2012), Garmisch-Partenkirchen/Germany; 10.09.2012.

Nowadays, it is common practice to deposit coatings by magnetron sputtering with sufficiently high deposition rate. Even inner walls of hollow cylinders may be coated by this technique. However, due to the space required for magnets in the interior of the cylindrical sputter source there is a limit in down sizing the diameter of the source and hence a limit in the minimal diameter of hollow cylinders to be coated.
Triode sputter deposition, which is known since a long time, does not need the incorporation of magnets into the cylindrical sputter target and would therefore allow smaller diameters of the sputter target and hence would allow the deposition of inner walls of narrower hollow cylinders. In the present study a steel sleeve with an inner diameter of 30,5 mm and a height of 50 mm was used as a substrate to prove the principle. This inner diameter is not the limit of the process, it could be easily further decreased.
A detailed electrical characterization of the discharge was performed and the deposition process was demonstrated using a target made of CuSn8. Uniform deposition rates of more than 1μm/h were observed.