[Zurück]

V. Ruiz, J. Hernando-Garcia, A. Ababneh, H. Seidel, U. Schmid, J.L. Sànchez-Rojas:
"Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode";
Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 18 (2012), S. 997 - 1001.

The characterization of the first in-plane mode
of aluminum nitride-actuated piezoelectric microcantilevers
was carried out by using electrical and optical techniques.
The top electrode of the cantilever was specifically
designed to allow for an efficient electrical actuation of
these in-plane modes. In order to confirm the in-plane
nature of the modal vibration, the detection of the electrically
induced movement was performed optically with the
help of a stroboscopic microscope. In parallel, resonances
were also measured electrically by means of an impedance
analyzer. The quality factor and the resonant frequencies of
the in-plane modes were estimated from the corresponding
measurement data when applying both detection techniques.
Our results show quality factor values as high as
3,000 for the first in-plane mode in air.

The characterization of the first in-plane mode
of aluminum nitride-actuated piezoelectric microcantilevers
was carried out by using electrical and optical techniques.
The top electrode of the cantilever was specifically
designed to allow for an efficient electrical actuation of
these in-plane modes. In order to confirm the in-plane
nature of the modal vibration, the detection of the electrically
induced movement was performed optically with the
help of a stroboscopic microscope. In parallel, resonances
were also measured electrically by means of an impedance
analyzer. The quality factor and the resonant frequencies of
the in-plane modes were estimated from the corresponding
measurement data when applying both detection techniques.
Our results show quality factor values as high as
3,000 for the first in-plane mode in air.

http://dx.doi.org/10.1007/s00542-012-1428-x