[Back]

A. Alamin Dow, A. Ahmed, A. Bittner, C. Popov, U. Schmid, N. Kherani:
"SAW Nano-Transducer Utilizing Ultra-Nanocrystalline Diamond/AlN Bi-Layer";
Talk: IEEE Ultrasonics Symposium, Dresden; 10-07-2012 - 10-10-2012; in: "Proceedings IEEE Ultrasonics Symposium", IEEE, (2012), ISBN: 978-3-99033-045-6.

This article reports on the realization of high frequency surface acoustic wave (SAW) resonator architectures on a bi-layer aluminium nitride (AlN) /ultrananocrystalline diamond (UNCD) structure using electron beam lithography (EBL) and lift-off processes. The UNCD layer was simply synthesized using microwave plasma enhanced vapour deposition (MWPECVD). An optimized EBL process was utilized to fabricate the inter-digital transducers (IDTs) with a finger resolution of 145nm. The fabricated device exhibited an operating frequency of 15.4 GHz, insertion loss of ~40 dB and an acoustic velocity of 8816m/s.