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Publications in Scientific Journals:

L. Filipovic, S. Selberherr:
"A Method for Simulating Atomic Force Microscope Nanolithography in the Level Set Framework";
Microelectronic Engineering, 107 (2013), 23 - 32.



"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.mee.2013.02.083

Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2012/JB2013_Filipovic_1.pdf


Created from the Publication Database of the Vienna University of Technology.