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D. Tumpold, M. Kaltenbacher, C. Glacer, M. Nawaz, A. Dehé:
"Modeling of an electrostatically actuated microelectromechanical (MEMS) speaker system";
Talk: PRIME 2013 9th Conference on Ph. D. Research in Microelectronics and Electronics, Villach; 2013-06-24 - 2013-06-27; in: "Conference Proceedings PRIME2013 9th Conference on Ph. D. Research in Microelectronics and Electronics", IEEE Operations Center, 445 Hoes Lane, NJ 08854, CFP13622-PRT (2013), ISBN: 978-1-4673-4580-4; 293 - 296.

The market for tablets, laptops and mobile devices
is increasing rapidly. Device housings get thinner and energy
efficiency plays a major role for battery-powered devices.
Microelectromechanical (MEMS) loudspeakers, fabricated in
complementary metal oxide semiconductor (CMOS) compatible
technology merge energy efficient driving technology with cost
economical fabrication processes. Fabricating these devices is a
elaborating and expensively task. Therefore, the need of
computer models, capable of precisely simulating the multi-field
interactions is strongly increasing. We use a system of coupled
partial differential equations (PDEs) describing the interaction
between the electrostatic, mechanical and acoustical field and
apply finite element method FEM to solve them. Additionally, we
fully take nonlinear effects like large deformations or stress
stiffening effects into account. Mortar FEM is used, to efficiently
handle the coupling between mechanical and acoustical field. In
combination with special boundary conditions, like perfectly
matched layers (PML) truncated propagation regions can be
applied in the model. We will present simulations of a MEMS
speaker system based on a single sided driving mechanism
starting at the electric potential applied on the two electrodes and
resulting in the generated sound pressure level (SPL).

MEMS, finite element modeling, speaker, nonlinerities, electrostatic force, mechanics, acoustics, sound pressure level