[Zurück]

V Ruiz-Díez, T. Manzaneque, J. Hernando-Garcia, A. Ababneh, M. Kucera, U. Schmid, H. Seidel, J.L. Sànchez-Rojas:
"Design and characterization of AlN-based in-plane microplate resonators";
Journal of Micromechanics and Microengineering, 23 (2013).

In this paper, a design procedure to perform an efficient actuation of in-plane modes in piezoelectric resonators is presented. This procedure is applied to different microplate structures, paying attention to two in-plane mode families: contour modes and flexure-actuated modes. A representative set of devices from both families were used as illustrative examples. These devices were characterized electrically by measuring the impedance and their in-plane
modal shapes were measured with a novel technique based on speckle-pattern interferometry. Figures of merit such as the quality factor or the motional resistance were obtained and used to evaluate the different design approaches.

http://dx.doi.org/10.1088/0960-1317/23/7/074003