Talks and Poster Presentations (with Proceedings-Entry):
A. Ababneh, A. Al-Omari, H. Qiu, T. Manzaneque, J. Hernando-Garcia, J.L. Sànchez-Rojas, A. Bittner, U. Schmid, H. Seidel:
"Pressure Dependence of the Quality Factor of Piezoelectrically driven AlN/Si-Microcantilevers";
Talk: SPIE Microtechnologies 2013,
Grenoble, France;
2013-04-24
- 2013-04-26; in: "Proceedings of SPIE",
8763
(2013),
ISSN: 0277-786x.
English abstract:
In this work, the fabrication process of piezoelectric AlN cantilevers is presented. The cantilevers were electrically
characterized in a vacuum chamber offering the possibility to close-loop control the back pressure from atmospheric
conditions down to 5x10-3 mbar. The quality factor (Q factor) is an important figure of merit to evaluate the performance
of micro-resonators. In particular, two different modes were detected and analyzed. The first bending mode detected at
19.5 kHz has a quality factor of 470 at atmospheric pressure which increases continuously to 985 at 1x10-1 mbar. The
corresponding resonant frequency shifted from 19.500 kHz at atmospheric pressure to 19.573 kHz at 5 mbar. Below this
pressure level, the resonance frequency stays unaffected within the measurement accuracy.
The second bending mode detected at 117.264 kHz exhibits a quality factor of about 570 at atmospheric pressure
increasing continuously to 1275 at 1x10-1 mbar. In agreement with the other resonant frequency under investigation the
corresponding resonant frequency decreased from 117.264 kHz at atmospheric pressure to 117.630 kHz at 5 mbar.
Keywords:
Resonantly driven micro cantilevers, piezoelectric, aluminium nitride, quality factor, pressure dependence.
Created from the Publication Database of the Vienna University of Technology.