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S. Ito, J. Steininger, P. Chang, G. Schitter:
"High-precision Positioning System using a Low-stiffness Dual Stage Actuator";
Vortrag: 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China; 10.04.2013 - 12.04.2013; in: "Proceedings of 6th IFAC Symposium on Mechatronic Systems", (2013), S. 20 - 27.

In this paper, a dual stage actuator (DSA) system that is able to achieve both
large stroke and high precision positioning is proposed. The DSA system is composed of an
industrial linear motor and a commercial CD/DVD laser pickup head used as coarse and fine
actuators, respectively. Since the pickup head is constructed as a low-stiffness fine actuator,
by implementing a high control bandwidth for the fine actuation, the system is able to reject
disturbances stemming from the low mechanical coupling of the DSA design. By estimating
the relative distance of the two actuators without a position sensor, a phase lag compensator
and a feedforward controller are implemented for the coarse actuation. Experimental results
demonstrate that the DSA system is able to position over a long range of 500mm at
±15 nanometer static precision with a settling time of only 1.72 seconds.

dual stage actuator, high precision positioning system, Lorentz actuator, low stiffness actuator