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A. Alamin Dow, A. Bittner, U. Schmid, N. Kherani:
"Design, Fabrication and Characterization of a Micromachined Piezoelectric Energy Harvester Excited by Ambient Vibrations";
Talk: SPIE Microtechnologies 2013, Grenoble, France; 04-24-2013 - 04-26-2013; in: "Proceedings of SPIE", 8763 (2013), ISSN: 0277-786x.

This research work presents the design, fabrication and characterization of micromachined piezoelectric energy harvester
stimulated by ambient random vibrations utilizing AlN as a piezoelectric material. The device design consists of a silicon
cantilever beam on which AlN is sandwiched between two electrodes and a silicon seismic mass at the end of the
cantilever beam. The generated electric power of the devices was experimentally measured at various acceleration levels.
A maximum power of 34 μW was obtained at an acceleration value of 2g for the device which measures 5.6 x 5.6 mm2.
Various unpackaged devices were tested and assessed in terms of the generated power and resonant frequency at various
acceleration values.

piezoelectricity, energy harvesting, vibration, aluminum nitride