Talks and Poster Presentations (with Proceedings-Entry):
A. Alamin Dow, H. Lin, C. Popov, U. Schmid, N. Kherani:
"High Frequency SAW Nanotransducer Utilizing an Ultrananocrystalline Diamond/ AlN Bimorph Architecture";
Talk: 2013 IEEE 5th International Nanoelectronics Conference (INEC),
Resorts World Sentosa, Singapore;
01-02-2013
- 01-04-2013; in: "Proceedings of the 2013 IEEE 5th International Nanoelectronics Conference (INEC)",
IEEE,
CFP13625-USB
(2013),
ISBN: 978-1-4673-4841-6;
360
- 363.
English abstract:
This article reports on the development and realization of a super high frequency surface acoustic wave (SAW) nanotranducer architecture based on a bi-layer of aluminum nitride (AlN) and ultrananocrystalline diamond (UNCD). The SAW nanotransducer was fabricated on an AlN/UNCD structure using electron beam lithography and lift off processes. The SAW device consists of nano inter-digitated transducers (n-IDTs) at both the input and output ports. The fabricated devices exhibited response over a high frequency range, as high as 18.4 GHz, with minimal insertion losses. The good frequency characteristics of the fabricated devices and compatibility with existing fabrication technologies open the way for the realization of advanced AlN/UNCD based transducers.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/INEC.2013.6466047
Created from the Publication Database of the Vienna University of Technology.