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Zeitschriftenartikel:

S. Kuiper, P. M. J. Van den Hof, G. Schitter:
"Integrated designof the feedback controller and topography estimator for atomic force microscopy";
Control Engineering Practice, 21 (2013), S. 1110 - 1120.



Kurzfassung englisch:
In atomic force microscopy (AFM) the force between the measurement tip and the sample is
controlled in
a feedback loop to prevent damage of the tip and sample during imaging, and to convert
the measurement of the tip-sample force into an estimate of the sample topography. Dynamical
uncertain- ties of the system limit the achievable control bandwidth and the accuracy of the
topography estimation. This paper presents an integrated approach to design a feedback
controller and topography estimator, taking into account the dynamical uncertainties of the
system. The proposed methodology is experimentally demonstrated on a commercial AFM
system, showing a direct trade-off between the
control bandwidth and the accuracy of the topography estimation.

Erstellt aus der Publikationsdatenbank der Technischen Universitšt Wien.