Talks and Poster Presentations (with Proceedings-Entry):
J. Sama, S. Barth, J. Prades, O. Casals, I. Gracia, C. Cane, A. Romano-Rodriquez:
"Energy-Efficient Localised Growth of SnO2 Nanowires on Micromembranes for the Fabrication of Advanced Low Power Gas Sensors";
Talk: 2013 MRS Fall Meeting & Exhibit,
- 12-06-2013; in: "2013 MRS Fall Meeting - Abstract & Program Book",
One-dimensional semiconductor nanostructures with adjustable morphologies, dimensions, crystallographic phases, and orientations are a topic of intense research due to the large different fields in which they can be employed, like electronics, sensing, energy harvesting, etc... Several different techniques have been successfully used for the growth of high quality semiconducting nanowires that usually employ furnaces in which the whole substrate is heated for the effective fabrication of the nanowires. These approaches are not cost-effective nor allow the localized growth of the nanowires, which limits their incorporation into certain devices.
Recently  we have developed a new strategy for the site-specific growth of nanowires on predetermined regions of micromachined substrates that, at the same time, will constitute the final device. This has been demonstrated by the localized growth of high quality Ge and SnO2 semiconducting nanowires by the VLS mechanism, using molecular precursors, on top of micromachined suspended micromembranes or microhotplates, whose lateral dimensions are between 100 micrometers and 1 millimeter. These structures contain a buried heating element and surface interdigitated electrodes and use the heater to provide the required thermal energy for the synthesis of the nanowires.
In this work we will present the results we have obtained from growing SnO2 nanowires under varying heater temperatures and precursor conditions on top of micromembranes, as well as the gas response of these chemoresistors towards different toxic gases (CO, NO2, ...). The proposed fabrication strategy is energetically efficient because the electrical power required to grow the nanowires was limited to 50mW.
Created from the Publication Database of the Vienna University of Technology.