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J. Sama, S. Barth, J. Prades, O. Casals, I. Gracia, C. Cane, A. Romano-Rodriguez:
"Localized growth of SnO₂ nanowires for environmental monitoring";
Poster: 2014 EMRS Spring Meeting, Lille, France; 25.05.2014 - 29.05.2014; in: "2014 EMRS Spring Meeting - PROGRAM VIEW", (2014).

Nanowires (NWs) have emerged as an important topic of research due to their high aspect ratio, and their capability to be part of new device architectures. Especially monocrystalline materials are important to achieve effective and known interactions of their surface in several applications, like gas sensors. An imporante issue that prevents the use of the nanostructures in functional electronic devices is their integration into a scalable process. Here we present a method for localized site selective direct growth of inorganic NWs that avoids several technological steps, reducing uncertainty factors of the process fabrication. VLS growth of SnO2 NWs is developed on top of CMOS compatible micromembranes with top interdigitated electrodes and buried integrated heater, which provides the thermal energy required for the growth. The SnO2 NWs show high crystalline quality and once the growth is finished, no post-processing is required because of NW bundles bridge the interdigitated contacts on top of the membrane. Thus, a scalable and time efficient process has been developed. The one-step fabrication device has been proven as a low power gas sensor, showing high response levels and low response times towards CO, NH₃ and NO₂ in a synthetic air atmosphere. The obtained devices will be shown as suitable for environmental gas sensing monitoring. The fabrication methodology will be described and its extension to the growth of other materials will be critically discussed.