Talks and Poster Presentations (with Proceedings-Entry):
D. Tumpold, M. Kaltenbacher:
"Precise numerical simulation of electrostatically driven actuators with application to MEMS loudspeakers";
Talk: 8th European Nonlinear Dynamics Conference ENOC 2014,
Wien;
2014-07-06
- 2014-07-11; in: "ENOC 2014",
ENOC 2014 - Proceedings of 8th European Nonlinear Dynamics Conference,
(2014),
ISBN: 978-3-200-03433-4;
1
- 6.
English abstract:
A recently developed Finite-Element (FE) model for the precise computation of electrostatic driven MEMS (Micro-ElectroMechanical-Systems) is presented. Thereby, we fullytake geometric nonlinearity, contact in the snap-in mode, nonlinear electrostatic
coupling forces as well as the moving of charged thin membrane-plate structures (electrodes) in an electric field into account.
Furthermore, since we concentrate on MEMS loudspeaker applications, we can also compute the radiated sound. In addition to this, an
optimization method towards sound pressure level increase is presented, namely the buckling back platemethod. In this method stress
induced self raising is applied to increase the volume flow of the speaker.
Electronic version of the publication:
http://publik.tuwien.ac.at/files/publik_229600.pdf
Created from the Publication Database of the Vienna University of Technology.