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J. Steininger, R. Paris, G. Schitter:
"Increasing sensitivity while reducing crosstalk of the force sensor in atomic force microscopes";
Poster: 14th International Conference and Exhibition of the European Society for Precision Engineering & Nanotechnology, Dubrovnik, Croatia; 02.06.2014 - 06.06.2014; in: "Proceedings of the 14th International Conference of the European Society for Precision Engineering and Nanotechnology", Euspen, (2014), ISBN: 978-0-9566790-3-1; S. 321 - 324.

The sensitivity of the force sensor in an atomic force microscope (AFM) is an
important property, as it is a determining factor for the vertical imaging resolution.
While the angular sensitivity related to the real deflection of the cantilever should be
as high as possible, the translational sensitivity should be minimized to reduce the
crosstalk between the compensating cantilever movement and the deflection readout.
This contribution analyses the angular and translational sensitivity and presents a
novel design to significantly reduce the crosstalk while increasing the angular
sensitivity by more than a factor of five.