M. Gavagnin, H. D. Wanzenböck, M. Shawrav, D. Belic, S. Wachter, S. Waid, M. Stöger-Pollach, E. Bertagnolli:
"Focused Electron Beam-Induced CVD of Iron: a Practical Guide for Direct Writing";
Chemical Vapor Deposition, 20 (2014), 7-9; S. 243 - 250.

Kurzfassung englisch:
Magnetic materials synthesized on the nanometer-scale level are essential for several applications, such as spintronics and magnetologic. As a successful nanofabrication approach, focused electron beam-induced deposition (FEBID) stands out as a direct-write technique. FEBID uses an electron beam to locally induce a CVD process, avoiding the use of masks and resists. In this work, Fe-based nanostructures are synthesized on Si(100) by FEBID, starting from iron pentacarbonyl. A systematic variation of FEBID parameters is performed, to study their influence on the geometry and composition of the deposit. Based on the results, specific deposition conditions are suggested for magneto-logic applications and fabrication of large structures.

Focused electron beam-induced deposition; Iron; Magnetism; Nanowires

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