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P.M. Mayrhofer, H. Euchner, A. Bittner, U. Schmid:
"Circular test structure for the determination of piezoelectric constants of ScxAl1−xN thin films applying Laser Doppler Vibrometry and FEM simulations";
Sensors and Actuators A: Physical, 222 (2015), 301 - 308.

Piezoelectric scandium aluminium nitride (ScxAl1−xN) thin films offer a large potential for the applicationin micro electromechanical systems, as advantageous properties of pure AlN thin films are maintained,but combined with an increased piezoelectric actuation and sensing potential. ScxAl1−xN thin films withx = 27% have been prepared by DC reactive magnetron sputtering to find optimized deposition parametersto maximize the piezoelectric constants d33and d31. For the accurate and simultaneous measurementof these constants Laser Doppler Vibrometry has been applied and compared to finite element (FEM)simulations. The electrode design has been optimized to rotational symmetric structures enabling a 180◦phase shifted excitation, so that a straight-forward comparison of experimental displacement curveswith those obtained from FEM is feasible.

Piezoelectric scandium aluminium nitride (ScxAl1−xN) thin films offer a large potential for the applicationin micro electromechanical systems, as advantageous properties of pure AlN thin films are maintained,but combined with an increased piezoelectric actuation and sensing potential. ScxAl1−xN thin films withx = 27% have been prepared by DC reactive magnetron sputtering to find optimized deposition parametersto maximize the piezoelectric constants d33and d31. For the accurate and simultaneous measurementof these constants Laser Doppler Vibrometry has been applied and compared to finite element (FEM)simulations. The electrode design has been optimized to rotational symmetric structures enabling a 180◦phase shifted excitation, so that a straight-forward comparison of experimental displacement curveswith those obtained from FEM is feasible.

Aluminum nitride; AlNScAlN; Piezoelectric thin film; Vibrometry; Interferometry

http://dx.doi.org/10.1016/j.sna.2014.10.024

Project Head Ulrich Schmid:
Mikrosystemtechnik Projektkonto Schmid