Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
P.M. Mayrhofer, H. Euchner, A. Bittner, U. Schmid:
"Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN";
Poster: EUROSENSORS 2014 - 28th European Conference on Solid-State Transducers,
Brescia, I;
07.09.2014
- 10.09.2014; in: "Procedia Engineering",
Elsevier,
87
(2014),
ISSN: 1877-7058;
S. 112
- 115.
Kurzfassung deutsch:
Piezoelectric scandium aluminium nitride (ScxAl1-xN) thin films are very promising candidates for applications in micro-
electromechanical systems due to enhanced piezoelectric properties. To study the influence of deposition parameters on the
piezoelectric response, ScxAl1-xN with x = 27% Sc was deposited by reactive sputtering. For determination of piezoelectric
constants, platinum electrodes were utilized to measure the piezoelectric deflection via Laser Doppler Vibrometry and compared
to finite element simulations. A new electrode design for enhanced accuracy and reduction of computational effort is introduced.
Circularly arranged ring electrodes (`bull´s eye´) enable the precise and simultaneous determination of d31 and d33.
Kurzfassung englisch:
Piezoelectric scandium aluminium nitride (ScxAl1-xN) thin films are very promising candidates for applications in micro-
electromechanical systems due to enhanced piezoelectric properties. To study the influence of deposition parameters on the
piezoelectric response, ScxAl1-xN with x = 27% Sc was deposited by reactive sputtering. For determination of piezoelectric
constants, platinum electrodes were utilized to measure the piezoelectric deflection via Laser Doppler Vibrometry and compared
to finite element simulations. A new electrode design for enhanced accuracy and reduction of computational effort is introduced.
Circularly arranged ring electrodes (`bull´s eye´) enable the precise and simultaneous determination of d31 and d33.
Schlagworte:
Scandium, AlN, ScxAl1-xN, Piezoelectric, Vibrometer, Comsol, MEMS
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.proeng.2014.11.396
Zugeordnete Projekte:
Projektleitung Ulrich Schmid:
Mikrosystemtechnik Projektkonto Schmid
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.