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P.M. Mayrhofer, H. Euchner, A. Bittner, U. Schmid:
"Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN";
Poster: EUROSENSORS 2014 - 28th European Conference on Solid-State Transducers, Brescia, I; 2014-09-07 - 2014-09-10; in: "Procedia Engineering", Elsevier, 87 (2014), ISSN: 1877-7058; 112 - 115.

Piezoelectric scandium aluminium nitride (ScxAl1-xN) thin films are very promising candidates for applications in micro-
electromechanical systems due to enhanced piezoelectric properties. To study the influence of deposition parameters on the
piezoelectric response, ScxAl1-xN with x = 27% Sc was deposited by reactive sputtering. For determination of piezoelectric
constants, platinum electrodes were utilized to measure the piezoelectric deflection via Laser Doppler Vibrometry and compared
to finite element simulations. A new electrode design for enhanced accuracy and reduction of computational effort is introduced.
Circularly arranged ring electrodes (`bull´s eye´) enable the precise and simultaneous determination of d31 and d33.

Piezoelectric scandium aluminium nitride (ScxAl1-xN) thin films are very promising candidates for applications in micro-
electromechanical systems due to enhanced piezoelectric properties. To study the influence of deposition parameters on the
piezoelectric response, ScxAl1-xN with x = 27% Sc was deposited by reactive sputtering. For determination of piezoelectric
constants, platinum electrodes were utilized to measure the piezoelectric deflection via Laser Doppler Vibrometry and compared
to finite element simulations. A new electrode design for enhanced accuracy and reduction of computational effort is introduced.
Circularly arranged ring electrodes (`bull´s eye´) enable the precise and simultaneous determination of d31 and d33.

Scandium, AlN, ScxAl1-xN, Piezoelectric, Vibrometer, Comsol, MEMS

http://dx.doi.org/10.1016/j.proeng.2014.11.396

Project Head Ulrich Schmid:
Mikrosystemtechnik Projektkonto Schmid