Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
M. Schneider, A. Bittner, P Schmid, U. Schmid:
"Impact of c-axis orientation of aluminium nitride thin films on the long-term stability and mechanical properties of resonantly excited MEMS cantilevers";
Vortrag: EUROSENSORS 2014 - 28th European Conference on Solid-State Transducers,
Brescia, I;
07.09.2014
- 10.09.2014; in: "Procedia Engineering",
Elsevier,
87
(2014),
ISSN: 1877-7058;
S. 1493
- 1496.
Kurzfassung deutsch:
In this work, the influence of c-axis orientation of sputter-deposited aluminium nitride thin films on the mechanical properties
and long-term stability of resonantly excited, Si-based MEMS cantilevers is investigated. Two AlN films are synthesized at
different deposition parameters yielding a strong difference in the degrees of c-axis orientation. It is demonstrated, that the
temperature and pressure dependency of the mechanical behaviour is independent of the c-axis orientation of the AlN films.
However, a substantial impact of this film parameter on the long-term stability of the devices is observed.
Kurzfassung englisch:
In this work, the influence of c-axis orientation of sputter-deposited aluminium nitride thin films on the mechanical properties
and long-term stability of resonantly excited, Si-based MEMS cantilevers is investigated. Two AlN films are synthesized at
different deposition parameters yielding a strong difference in the degrees of c-axis orientation. It is demonstrated, that the
temperature and pressure dependency of the mechanical behaviour is independent of the c-axis orientation of the AlN films.
However, a substantial impact of this film parameter on the long-term stability of the devices is observed.
Schlagworte:
aluminum nitride, cantilever, mechanical properties, resonantly excited, mechanical resonance, long-term stability
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.proeng.2014.11.581
Zugeordnete Projekte:
Projektleitung Ulrich Schmid:
Mikrosystemtechnik Projektkonto Schmid
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.