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M. Schneider, A. Bittner, P Schmid, U. Schmid:
"Impact of c-axis orientation of aluminium nitride thin films on the long-term stability and mechanical properties of resonantly excited MEMS cantilevers";
Talk: EUROSENSORS 2014 - 28th European Conference on Solid-State Transducers, Brescia, I; 09-07-2014 - 09-10-2014; in: "Procedia Engineering", Elsevier, 87 (2014), ISSN: 1877-7058; 1493 - 1496.

In this work, the influence of c-axis orientation of sputter-deposited aluminium nitride thin films on the mechanical properties
and long-term stability of resonantly excited, Si-based MEMS cantilevers is investigated. Two AlN films are synthesized at
different deposition parameters yielding a strong difference in the degrees of c-axis orientation. It is demonstrated, that the
temperature and pressure dependency of the mechanical behaviour is independent of the c-axis orientation of the AlN films.
However, a substantial impact of this film parameter on the long-term stability of the devices is observed.

In this work, the influence of c-axis orientation of sputter-deposited aluminium nitride thin films on the mechanical properties
and long-term stability of resonantly excited, Si-based MEMS cantilevers is investigated. Two AlN films are synthesized at
different deposition parameters yielding a strong difference in the degrees of c-axis orientation. It is demonstrated, that the
temperature and pressure dependency of the mechanical behaviour is independent of the c-axis orientation of the AlN films.
However, a substantial impact of this film parameter on the long-term stability of the devices is observed.

aluminum nitride, cantilever, mechanical properties, resonantly excited, mechanical resonance, long-term stability

http://dx.doi.org/10.1016/j.proeng.2014.11.581

Project Head Ulrich Schmid:
Mikrosystemtechnik Projektkonto Schmid