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V Ruiz-Díez, J. Hernando-Garcia, M. Kucera, A. Ababneh, U. Schmid, H. Seidel, J.L. Sànchez-Rojas:
"Modelling Of Out-Of-Plane And In-Plane Modes Of Microplates In Liquid Media";
Talk: MME 2014 - 25th Micromechanics and Microsystems Europe workshop, Istanbul, Türkei; 08-31-2014 - 09-03-2014; in: "MME 2014 - 25th Micromechanics and Microsystems Europe workshop", (2014), 1 - 4.

In this paper, the quality factor and
resonant frequency of microplates immersed in
liquid, with various geometries and vibration modes,
are simulated by means of a finite element method
(FEM), and compared with experimental data. For
in-plane modes, we have studied the first extensional
mode of mid-point supported microplates which may
be efficiently actuated by a thin piezoelectric film on
top of the structure. A comparison of different
approaches, to account for the viscous loading in
computationally efficient 2D FEM models, is pre-
sented. As an alternative to the harmonic response, a
novel multitone excitation in the fluid-structure
interaction model allows for the calculation of the
frequency response of the structure. Out-of-plane
modes of various orders are investigated using both
numerical and analytical models. With the help of
these tools, the applicability of the micro-resonators
as viscosity and density sensors will be discussed.

In this paper, the quality factor and
resonant frequency of microplates immersed in
liquid, with various geometries and vibration modes,
are simulated by means of a finite element method
(FEM), and compared with experimental data. For
in-plane modes, we have studied the first extensional
mode of mid-point supported microplates which may
be efficiently actuated by a thin piezoelectric film on
top of the structure. A comparison of different
approaches, to account for the viscous loading in
computationally efficient 2D FEM models, is pre-
sented. As an alternative to the harmonic response, a
novel multitone excitation in the fluid-structure
interaction model allows for the calculation of the
frequency response of the structure. Out-of-plane
modes of various orders are investigated using both
numerical and analytical models. With the help of
these tools, the applicability of the micro-resonators
as viscosity and density sensors will be discussed.

MEMS, FEM, FSI, in-plane motion, out-of-plane motion, viscosity sensor

Project Head Ulrich Schmid:
Mikrosystemtechnik Projektkonto Schmid