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J. Iannacci, E. Serra, G. Sordo, M. Bonaldi, A. Borielli, U. Schmid, A. Bittner, M. Schneider, T. Kuenzig, G. Schrag, G. Pandraud, P. Sarro:
"MEMS Based Multi Modal Vibration Energy Harvesters for Ultra Low Power Autonomous Remote and Distributed Sensing";
Talk: Mechatronics 2014, Karlstad, Sweden; 06-16-2014 - 06-18-2014; in: "Proceedings of the 14th Mechatronics Forum International Conference", (2014), 1 - 8.

In this contribution we discuss the implementation of
a novel MEMS-based EH (Energy Harvester) concept within an
already existing technology platform available at the ISAS
Institute (TU Vienna, Austria). The device, already presented by
the authors, exploits the piezoelectric effect to convert
environmental vibration energy into electricity, and presents
multiple resonant modes in the frequency range of interest (i.e.
below 10 kHz). The experimental characterization of sputter
deposited AlN (Aluminum Nitride) piezoelectric thin-film layer
is reported, leading to the extraction of material properties
parameters. Such values are then incorporated in the FEM
(Finite Element Method) model of the EH, implemented in
Ansys WorkbenchTM, in order to get reasonable estimates of the
converted power levels achievable by the proposed device
solution. Multiphysics simulations indicate that extracted power
values in the range of several μW can be addressed by the
MEMS EH concept when subjected to mechanical vibrations up
to 10 kHz, operating in closed-loop conditions (i.e. piezoelectric
generator connected to a 100 kΩ resistive load). This represents
an encouraging result, opening up the floor to exploitations of
the proposed MEMS EH device in the field of WSNs (Wireless
Sensor Networks) and zero-power sensing nodes. Comparisons
of simulated and measured extracted power performance will be
carried out as soon as the fabrication process of physical
samples will be accomplished.

In this contribution we discuss the implementation of
a novel MEMS-based EH (Energy Harvester) concept within an
already existing technology platform available at the ISAS
Institute (TU Vienna, Austria). The device, already presented by
the authors, exploits the piezoelectric effect to convert
environmental vibration energy into electricity, and presents
multiple resonant modes in the frequency range of interest (i.e.
below 10 kHz). The experimental characterization of sputter
deposited AlN (Aluminum Nitride) piezoelectric thin-film layer
is reported, leading to the extraction of material properties
parameters. Such values are then incorporated in the FEM
(Finite Element Method) model of the EH, implemented in
Ansys WorkbenchTM, in order to get reasonable estimates of the
converted power levels achievable by the proposed device
solution. Multiphysics simulations indicate that extracted power
values in the range of several μW can be addressed by the
MEMS EH concept when subjected to mechanical vibrations up
to 10 kHz, operating in closed-loop conditions (i.e. piezoelectric
generator connected to a 100 kΩ resistive load). This represents
an encouraging result, opening up the floor to exploitations of
the proposed MEMS EH device in the field of WSNs (Wireless
Sensor Networks) and zero-power sensing nodes. Comparisons
of simulated and measured extracted power performance will be
carried out as soon as the fabrication process of physical
samples will be accomplished.