[Zurück]

D. Belic, M. Shawrav, M. Gavagnin, M. Stöger-Pollach, H. D. Wanzenböck, E. Bertagnolli:
"Direct-Write Deposition and Focused-Electron-Beam-Induced Purification of Gold Nanostructures";
ACS Applied Materials & Interfaces, 7 (2015), S. 2467 - 2479.

Three-dimensional gold (Au) nanostructures offer promise in
nanoplasmonics, biomedical applications, electrochemical sensing and as contacts for carbon-based electronics. Direct-write techniques such as focused-electron-beam-induced deposition (FEBID) can provide such precisely patterned nanostructures. Unfortunately, FEBID Au traditionally suffers from a high nonmetallic content and cannot meet the purity requirements for these applications. Here we report exceptionally pure pristine FEBID Au nanostructures comprising submicrometer−large monocrystalline Au sections. On the basis of high-resolution transmission electron microscopy results and Monte Carlo simulations of electron trajectories in the deposited nanostructures, we propose a curing mechanism that elucidates the observed phenomena. The in situ focused-electron-beaminduced
curing mechanism was supported by postdeposition ex situ curing
and, in combination with oxygen plasma cleaning, is utilized as a
straightforward purification method for planar FEBID structures. This work paves the way for the application of FEBID Au nanostructures in a new generation of biosensors and plasmonic nanodevices.

FEBID, gold nanostructure, nanopillar, nanowire, purity, FEBIC, oxygen plasma cleaning

http://dx.doi.org/10.1021/am507327y