L. Filipovic, S. Selberherr:
"Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors";
Sensors, 15 (2015), 4; S. 7206 - 7227.
http://dx.doi.org/10.3390/s150407206Elektronische Version der Publikation:
http://www.iue.tuwien.ac.at/pdf/ib_2014/JB2015_Filipovic_1.pdf