[Zurück]

M. Huth, F. Porrati, C. Gspan, H. Plank, S. Barth:
"Focused Electron induced deposition with a heteronuclear precursor";
Vortrag: Annual Meeting of COST Action CM1301; Chemistry for Electron Induced NAnofabriction, Bratislava, Slavakei; 06.05.2015 - 09.05.2015; in: "2nd Annual Meeting of COST Action CM1301, CELINA - Book of Abstracts", (2015), S. 16.

Focused electron beam induced deposition (FEBID) has proven to be an extremely flexible direct-write method for the fabrication of magnetic nanostructures. With careful optimization of the preparation conditions largely carbon- and oxygen free deposits of Co and Fe can be obtained from the carbonyl based precursors Co₂(CO)₈ and Fe(CO)₅, respectively [1,2]. Recently, it was shown that Co deposits can be further purified by an in-situ post-growth treatment in H2 at elevated temperatures and under electron irradiation [3]. From the point of view of using FEBID structures for micromagnetic studies one would like to advance in several directions: (1) multi-component (binary, ternary) magnetic FEBID structures with, e.g., tunable magnetic properties; (2) alternative precursors which are reasonably easy to handle in the FEBID process and result in deposits with high metal content. Regarding the first point, in recent work two precursors have been used in parallel resulting in either the dilution of the magnetic phase [4] or the formation of a hard magnetic alloy [5]. However, in these cases the obtained material contained a significant volume fraction of the carbonaceous matrix. Here we present first results on the use of the heteronuclear precursor HFeCo₃(CO)₁₂ (see inset in figure) in FEBID that directly results in the formation of a ferromagnetic alloy phase with a metal content up to 80 at% [6]. First measurements of the temperature-dependent resistivity reveal metallic behavior with a tendency for localization below 50 K (see main figure). This likely places the as-grown material on the metallic side close to a metal-insulator transition.