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S. Ito, D. Neyer, S. Pirker, J. Steininger, G. Schitter:
"Atomic Force Microscopy Using Voice Coil Actuators for Vibration Isolation";
Vortrag: IEEE/ASME International conference on advanced intelligent mechatronics AIM2015, Busan (South Korea); 07.07.2015 - 11.07.2015; in: "Proceedings of the IEEE/ASME International conference on advanced intelligent mechatronics AIM2015", (2015), 6 S.

This paper presents a vibration isolation system
integrated with the internal actuators of an atomic force microscope
(AFM) to vertically move the probe. For the motion, voice
coil actuators (Lorentz actuators) are guided by low-stiffness
flexures. Due to the low stiffness, the vibrations from the floor
to the probe are decoupled at high frequencies. To reject the
residual vibrations, the AFM probe tracks the AFM sample
by using a displacement sensor. By mechanical and control
design specifically for Lorentz actuators, the vertical motion
has a control bandwidth that is 24 times higher than the first
mechanical resonance to reject vibrations. As a demonstration
of the vibration isolation performance, pits and tracks of a
CD-ROM are successfully imaged without an external vibration
isolator.