Contributions to Books:
L. Filipovic, S. Selberherr:
"Stress Considerations in Thin Films for CMOS-Integrated Gas Sensors";
in: "Advanced CMOS-Compatible Semiconductor Devices 17, Vol.66, No.5",
Y. Omura, J. A. Martino, J.-P. Raskin, S. Selberherr, H. Ishii, F. Gamiz, B.-Y. Nguyen (ed.);
issued by: The Electrochemical Society;
ECS Transactions,
2015,
ISBN: 978-1-62332-238-0,
243
- 250.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1149/06605.0243ecst
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2014/BC2015_Filipovic_1.pdf
Created from the Publication Database of the Vienna University of Technology.