S. Ito, G. Schitter:
"Comparison and Classification of High-precision Actuators Based on Stiffness Influencing Vibration Isolation";
IEEE/ASME Transactions on Mechatronics, 21(2) (2016), 10 S.

Kurzfassung englisch:
Positioning performance of high-precision systems
is influenced by vibrations transmitting from floors and types of
the precision actuators. To construct a compact actuator with
high vibration isolation for these systems, this paper investigates
and categorizes precision actuators based on their stiffness for
providing design rules. The effectiveness of the analysis and the
design rules is confirmed by experiments comparing two types
of compact precision actuators: piezoelectric and electromagnetic
(Lorentz, or voice coil) actuators. The positioning system with
these actuators is validated experimentally by applying steplike
disturbances of approximately 160nm to the base of the
actuators. While the position error of the piezo-actuated system
swings by about 200 nm, the Lorentz-actuated system that
satisfies the design rules is able to suppress the error within
a range of 10 nm.

Motion control, actuators, vibrations

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