[Zurück]

G. Puebla-Hellmann, M. Bachmann, F. Schwarz, G. Kastlunger, H. Riel, K. Venkatesan, H. Berke, R. Stadler, E. Lörtscher:
"Nanopores: A room-temperature stable and scalable platform for molecular electronics";
Vortrag: 15th International Conference on Nanotechnology (IEEE NANO 2015), Rom, Italien; 27.07.2015 - 30.07.2015.

Electronic building-blocks whose electrical characteristics
are based on the intrinsic transport mechanism of a
self-assembled monolayer (SAM) of molecules have the potential
to offer novel and application-tailored functionality, achievable
via synthetic chemistry approaches, while being less sensitive to
microscopic fluctuations compared to single-molecule electronics.
To implement such molecular building blocks and exploit their
full potential in a solid-state architecture, a scalable platform
compatible with standard fabrication processes is necessary,
which guarantees molecular integrity throughout the entire process
flow. Targeting a platform where the SAM is integrated in a
vertical orientation, we present a fabrication process that yields
pores with ultrasmooth platinum bottom electrodes and diameters
ranging from 100 m down to 30 nm. This scalable process
is demonstrated on 4" wafers with several 10´000 pores per
wafer and will allow the statistical study of molecular transport
properties based on large datasets under various conditions.

Projektleitung Robert Stadler:
Elektrochemische Interferenz