[Zurück]

V Ruiz-Díez, J. Hernando-Garcia, T. Manzaneque, M. Kucera, U. Schmid, J.L. Sànchez-Rojas:
"Modelling out-of-plane and in-plane resonant modes of microplates in liquid media";
Journal of Micromechanics and Microengineering, 25 (2015).

In this article, the quality factor and the resonant frequency of different vibrating modes of
microplates immersed in liquid are simulated by means of a finite element method (FEM) and
compared with experimental data. For the in-plane modes, we studied the first extensional mode
of mid-point supported microplates, which may be efficiently actuated by a thin piezoelectric
film on top of the structure. A comparison of different approaches to account for the viscous
loading in computationally efficient 2D finite element models is presented. As an alternative
to the harmonic response, a novel multitone excitation in the fluid-structure interaction model
allows for the calculation of the frequency response of the structure. For the out-of-plane
modes, different modes were simulated and compared to analytical models to validate our
approach. Our 2D FEM model yields more accurate estimations of the experimental resonance
frequency and quality factors than the available analytical models. With the help of these tools,
the applicability of the micro-resonators as viscosity and density sensors is discussed.

In this article, the quality factor and the resonant frequency of different vibrating modes of
microplates immersed in liquid are simulated by means of a finite element method (FEM) and
compared with experimental data. For the in-plane modes, we studied the first extensional mode
of mid-point supported microplates, which may be efficiently actuated by a thin piezoelectric
film on top of the structure. A comparison of different approaches to account for the viscous
loading in computationally efficient 2D finite element models is presented. As an alternative
to the harmonic response, a novel multitone excitation in the fluid-structure interaction model
allows for the calculation of the frequency response of the structure. For the out-of-plane
modes, different modes were simulated and compared to analytical models to validate our
approach. Our 2D FEM model yields more accurate estimations of the experimental resonance
frequency and quality factors than the available analytical models. With the help of these tools,
the applicability of the micro-resonators as viscosity and density sensors is discussed.

out-of-plane mode, in-plane mode, piezoelectric, FEM, FSI, fluid properties

http://dx.doi.org/10.1088/0960-1317/25/7/074005