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Zeitschriftenartikel:

V Ruiz-Díez, J. Hernando-Garcia, T. Manzaneque, M. Kucera, U. Schmid, J.L. Sànchez-Rojas:
"Viscous and acoustic losses in length-extensional microplate resonators in liquid media";
Applied Physics Letters, 106 (2015).



Kurzfassung deutsch:
Damping mechanisms in the length-extensional mode of rectangular, mid-point supported microplate
resonators immersed in liquid are studied. Piezoelectrically excited structures with different
lengths and thicknesses were designed, fabricated, and characterized both optically and electrically
in isopropanol. The experimental quality factors were compared to the results of Finite Element
Method (FEM) simulations and the two main mechanisms of losses, i.e., acoustic and viscous
losses, were identified. Analytical models for those two mechanisms are presented and the effects
of the geometry on the in-liquid performance of the resonators are discussed. By applying these
models, we found that for a given thickness, a maximum quality factor is reached at a critical
length, resulting from the balance between acoustic and viscous losses. To further increase quality
factors, a quarter wavelength fluid cavity was implemented, thereby reducing acoustic losses; an
increase over 40% in the quality factor was predicted by a 2D FEM model including the cavity,
and a quality factor as high as 145 was measured for a 3mm long and 93 lm thick resonator in this
configuration.

Kurzfassung englisch:
Damping mechanisms in the length-extensional mode of rectangular, mid-point supported microplate
resonators immersed in liquid are studied. Piezoelectrically excited structures with different
lengths and thicknesses were designed, fabricated, and characterized both optically and electrically
in isopropanol. The experimental quality factors were compared to the results of Finite Element
Method (FEM) simulations and the two main mechanisms of losses, i.e., acoustic and viscous
losses, were identified. Analytical models for those two mechanisms are presented and the effects
of the geometry on the in-liquid performance of the resonators are discussed. By applying these
models, we found that for a given thickness, a maximum quality factor is reached at a critical
length, resulting from the balance between acoustic and viscous losses. To further increase quality
factors, a quarter wavelength fluid cavity was implemented, thereby reducing acoustic losses; an
increase over 40% in the quality factor was predicted by a 2D FEM model including the cavity,
and a quality factor as high as 145 was measured for a 3mm long and 93 lm thick resonator in this
configuration.


"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1063/1.4913885


Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.