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C Zarfl, P Schmid, G Balogh, U. Schmid:
"Electro-mechanical properties and oxidation behaviour of TiAlNxOythin films at high temperatures";
Sensors and Actuators A: Physical, 226 (2015), 143 - 148.

tTiAlNxOythin films are investigated as possible candidates for high temperature stable strain gauge appli-cations. The thin films are deposited by reactive magnetron sputtering on sapphire and silicon substrateswith a thickness of 500 nm and 200 nm, respectively. The gauge factor is measured with a custom builtsetup up to 500◦C. At 100◦C this electro-mechanical parameter is about 2.5 and the mean value decreasesby about 10% when exposed to the maximum temperature level applied in this study. The temperaturecoefficient of the electrical resistance (TCR) is measured under vacuum conditions. The TCR is negativeand with a value of -5.13 × 10−4K−1very low compared to +3 × 10−3K−1determined at sputter-depositedplatinum films. Furthermore, the influence of oxidation effects on the electro-mechanical film propertiesis investigated.

tTiAlNxOythin films are investigated as possible candidates for high temperature stable strain gauge appli-cations. The thin films are deposited by reactive magnetron sputtering on sapphire and silicon substrateswith a thickness of 500 nm and 200 nm, respectively. The gauge factor is measured with a custom builtsetup up to 500◦C. At 100◦C this electro-mechanical parameter is about 2.5 and the mean value decreasesby about 10% when exposed to the maximum temperature level applied in this study. The temperaturecoefficient of the electrical resistance (TCR) is measured under vacuum conditions. The TCR is negativeand with a value of -5.13 × 10−4K−1very low compared to +3 × 10−3K−1determined at sputter-depositedplatinum films. Furthermore, the influence of oxidation effects on the electro-mechanical film propertiesis investigated.

TiAlN; TiAlON; Strain gauge; High temperature; Gauge factor; TCR; Oxidation

http://dx.doi.org/10.1016/j.sna.2015.02.026