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J. Toledo, T. Manzaneque, V Ruiz-Díez, M. Kucera, G. Pfusterschmied, E Wistrela, U. Schmid, J.L. Sànchez-Rojas:
"Oscillator Circuit Based On Higher-Order Out-Of-Plane Piezoelectric Resonators For Density-Viscosity Sensing Up To 0.5 Pa·s";
Talk: MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien; 09-20-2015 - 09-23-2015; in: "MME 2015 - 26th MicroMechanics Europe Workshop", (2015).

We report the use of two AlN-based piezoelectric microresonators for the monitoring of lubricant oil dilution with diesel. Two devices de-signed to resonate with the 5th-order out-of-plane modal vibration, but with different anchor schemes, were fabricated. Interface circuits were designed to convert the one-port impedance into a resonant two-port transfer function. This allowed us to design a PLL-based oscillator circuit implemented with a commercial lock-in amplifier. Our results demon-strate the performance of the resonators in fluids having viscosities up to 500 mPa·s. The performance of the sensors in terms of sensitivity and resolution are compared for both configurations.

We report the use of two AlN-based piezoelectric microresonators for the monitoring of lubricant oil dilution with diesel. Two devices de-signed to resonate with the 5th-order out-of-plane modal vibration, but with different anchor schemes, were fabricated. Interface circuits were designed to convert the one-port impedance into a resonant two-port transfer function. This allowed us to design a PLL-based oscillator circuit implemented with a commercial lock-in amplifier. Our results demon-strate the performance of the resonators in fluids having viscosities up to 500 mPa·s. The performance of the sensors in terms of sensitivity and resolution are compared for both configurations.

Microresonators, piezoelectric, densi-ty, viscosity, rheology, AlN, lubricant oil, oscillator circuits.