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V Ruiz-Díez, J. Toledo, T. Manzaneque, J. Hernando-Garcia, M. Kucera, U. Schmid, J.L. Sànchez-Rojas:
"Modelling And Characterization Of The Roof Tile-Shaped Modes Of Aln-Based Cantilever Resonators In Liquid Media";
Talk: MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien; 09-20-2015 - 09-23-2015; in: "MME 2015 - 26th MicroMechanics Europe Workshop", (2015).

In this paper, the first roof tile-shaped mode and higher orders are studied in cantilever structures of different sizes. These modes can be effi-ciently actuated by a thin piezoelectric film on top of the structure and a specific electrode design. The elec-trical and optical characterization of the different de-vices and modes is carried out in liquid media. The performance of the resonators is evaluated in terms of quality factor, resonant frequency and motional con-ductance. A quality factor as high as 125 was meas-ured in isopropanol for a cantilever oscillating in a high order roof tile-shaped mode at 7MHz. The effect of the fluid on the in-liquid response is studied using finite element method models. With the help of these tools, the applicability of the micro-resonators as vis-cosity and density sensors will be discussed.

In this paper, the first roof tile-shaped mode and higher orders are studied in cantilever structures of different sizes. These modes can be effi-ciently actuated by a thin piezoelectric film on top of the structure and a specific electrode design. The elec-trical and optical characterization of the different de-vices and modes is carried out in liquid media. The performance of the resonators is evaluated in terms of quality factor, resonant frequency and motional con-ductance. A quality factor as high as 125 was meas-ured in isopropanol for a cantilever oscillating in a high order roof tile-shaped mode at 7MHz. The effect of the fluid on the in-liquid response is studied using finite element method models. With the help of these tools, the applicability of the micro-resonators as vis-cosity and density sensors will be discussed.

MEMS, FEM, piezoelectricity, out-of-plane motion