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G. Pfusterschmied, M. Kucera, E Wistrela, W. Steindl, V Ruiz-Díez, A. Bittner, J.L. Sànchez-Rojas, U. Schmid:
"Piezoelectric Response Optimization of Multi Roof-Tile Modes in MEMS Resonators by Variation of the Support Boundary Conditions";
Vortrag: Transducers 2015, Anchorage, Alaska, USA; 21.06.2015 - 25.06.2015; in: "Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015", IEEE, (2015), ISBN: 978-1-4799-8955-3; S. 969 - 972.

This paper investigates strain-related conductance
peaks ΔG of advanced roof tile-shaped vibration-modes in
piezoelectrically actuated resonators by variation of the
support boundary conditions, leading to a complete new
class of liquid monitoring sensors. These new vibrationmodes
feature very high Q-factors in liquid media and
enhanced volume-strain values in the device. Combined
with an optimized electrode design, the enhanced volumestrain
results in very high strain-related conductance peaks
ΔG. Furthermore, the impact on the piezoelectric response
ΔG/Q is studied, leading to an increased ΔG/Q ratio by
~25% compared to single-side clamped resonators. These
features predestinate this new class of vibration-modes for a
large variety of challenging resonator-based sensing
applications in liquid media exceeding the overall
performance of commonly used out-of-plane vibrationmodes

This paper investigates strain-related conductance
peaks ΔG of advanced roof tile-shaped vibration-modes in
piezoelectrically actuated resonators by variation of the
support boundary conditions, leading to a complete new
class of liquid monitoring sensors. These new vibrationmodes
feature very high Q-factors in liquid media and
enhanced volume-strain values in the device. Combined
with an optimized electrode design, the enhanced volumestrain
results in very high strain-related conductance peaks
ΔG. Furthermore, the impact on the piezoelectric response
ΔG/Q is studied, leading to an increased ΔG/Q ratio by
~25% compared to single-side clamped resonators. These
features predestinate this new class of vibration-modes for a
large variety of challenging resonator-based sensing
applications in liquid media exceeding the overall
performance of commonly used out-of-plane vibrationmodes

Piezoelectric, MEMS resonators, liquid sensing