Talks and Poster Presentations (with Proceedings-Entry):
G. Pfusterschmied, M. Kucera, E Wistrela, W. Steindl, V Ruiz-Díez, A. Bittner, J.L. Sànchez-Rojas, U. Schmid:
"Piezoelectric Response Optimization of Multi Roof-Tile Modes in MEMS Resonators by Variation of the Support Boundary Conditions";
Talk: Transducers 2015,
Anchorage, Alaska, USA;
06-21-2015
- 06-25-2015; in: "Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015",
IEEE,
(2015),
ISBN: 978-1-4799-8955-3;
969
- 972.
English abstract:
This paper investigates strain-related conductance
peaks ΔG of advanced roof tile-shaped vibration-modes in
piezoelectrically actuated resonators by variation of the
support boundary conditions, leading to a complete new
class of liquid monitoring sensors. These new vibrationmodes
feature very high Q-factors in liquid media and
enhanced volume-strain values in the device. Combined
with an optimized electrode design, the enhanced volumestrain
results in very high strain-related conductance peaks
ΔG. Furthermore, the impact on the piezoelectric response
ΔG/Q is studied, leading to an increased ΔG/Q ratio by
~25% compared to single-side clamped resonators. These
features predestinate this new class of vibration-modes for a
large variety of challenging resonator-based sensing
applications in liquid media exceeding the overall
performance of commonly used out-of-plane vibrationmodes
German abstract:
This paper investigates strain-related conductance
peaks ΔG of advanced roof tile-shaped vibration-modes in
piezoelectrically actuated resonators by variation of the
support boundary conditions, leading to a complete new
class of liquid monitoring sensors. These new vibrationmodes
feature very high Q-factors in liquid media and
enhanced volume-strain values in the device. Combined
with an optimized electrode design, the enhanced volumestrain
results in very high strain-related conductance peaks
ΔG. Furthermore, the impact on the piezoelectric response
ΔG/Q is studied, leading to an increased ΔG/Q ratio by
~25% compared to single-side clamped resonators. These
features predestinate this new class of vibration-modes for a
large variety of challenging resonator-based sensing
applications in liquid media exceeding the overall
performance of commonly used out-of-plane vibrationmodes
Keywords:
Piezoelectric, MEMS resonators, liquid sensing
Created from the Publication Database of the Vienna University of Technology.